small stage IM-X1220

IM-X1220 - small stage

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Specifications

Model			IM-X1220
Type			Stage unit
Head used			IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm]	IM Head: 200 × 200, LM Head: 125 × 125
		High-precision mode [mm]	IM Head: 125 × 125, LM Head: 106 × 106
	AF height [mm]		IM Head: —, LM Head: 100 × 100
	Laser height [mm]		—
	Touch probe [mm]
Z stage	Moving range [mm]		150
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)		1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)		2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)		IM Head: —, LM Head: 3.8 + 0.04 L µm^3 ^4
Load capacity			15 kg^*5
Ratings	Power voltage		24 VDC
	Current consumption		7.5 A
Environmental resistance	Ambient temperature		+10 to 35°C^*6
Weight			29 kg
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C and with a load weighing 2 kg or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm. ^5 5 kg at XY stage travel speed of 120 mm/s. ^6 +15 to 35°C at XY stage travel speed of 120 mm/s.