Image Dimension Measurement System

IM-X1000 series

medium stage IM-X1330

IM-X1330 - medium stage

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model				IM-X1330
Type				Stage unit
Head used				IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm]		IM Head: 300 × 300, LM Head: 225 × 225
		High-precision mode [mm]		IM Head: 225 × 225, LM Head: 206 × 206
	AF height [mm]			IM Head: —, LM Head: 200 × 200
	Laser height [mm]			IM Head: 168 × 168, LM Head: 196 × 139
	Touch probe [mm]			IM Head: 146 × 196, LM Head: 150 × 196
Z stage	Moving range [mm]			150
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)			1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)			2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)			3.8 + 0.04 L µm^3 ^4
Load capacity				15 kg^*5
Ratings	Power voltage			24 VDC
	Current consumption			7.5 A
Environmental resistance	Ambient temperature			+10 to 35°C^*6
Weight				32 kg
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C and with a load weighing 2 kg or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm. ^5 5 kg at XY stage travel speed of 120 mm/s. ^6 +15 to 35°C at XY stage travel speed of 120 mm/s.

Data Sheet (PDF) Other Models