Image Dimension Measurement System

IM-X1000 series

large stage IM-X1540

IM-X1540 - large stage

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model				IM-X1540
Type				Stage unit
Head used				IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm]		IM Head: 500 × 400, LM Head: 425 × 325
		High-precision mode [mm]		IM Head: 425 × 325, LM Head: 406 × 306
	AF height [mm]			IM Head: —, LM Head: 400 × 300
	Laser height [mm]			IM Head: 368 × 268, LM Head: 396 × 239
	Touch probe [mm]			IM Head: 346 × 296, LM Head: 350 × 296
Z stage	Moving range [mm]			200
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)			1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)			2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)			3.8 + 0.04 L µm^3 ^4
Load capacity				15 kg^*5
Ratings	Power voltage			24 VDC
	Current consumption			7.5 A
Environmental resistance	Ambient temperature			+10 to 35°C^*6
Weight				70 kg
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C and with a load weighing 2 kg or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm. ^5 5 kg at XY stage travel speed of 120 mm/s. ^6 +15 to 35°C at XY stage travel speed of 120 mm/s.

Data Sheet (PDF) Other Models