High-Accuracy LM Head LM-XC100

LM-XC100 - High-Accuracy LM Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Specifications

Model				LM-XC100
Type				Head
Image measurement	Field of view	Wide-field mode [mm]		25 × 25
		High-precision mode [mm]		6 × 6
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 μm^*1
			High-precision mode	0.7 μm^*2
Laser height	Reference distance			—
	Repeatability
	Spot diameter
	Linearity
	Laser class
Touch probe	Repeatability
	Measuring force
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Colour LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C^*3
Weight				9 kg
^1 In the range of 20 × 20 mm, within the operating ambient temperature range of +23±1°C at the focal point position. ^2 In the range of 5 × 5 mm, within the operating ambient temperature range of +23±1°C at the focal point position. ^*3 +15 to 35°C at XY stage travel speed of 120 mm/s.